High Precision Automatic Vacuum Chamber Helium Leak Testing Equipment 9.0E-11Pa.m3/sec

High Precision Automatic Vacuum Chamber Helium Leak Testing Equipment 9.0E-11Pa.m3/sec

This helium leak testing equipment is quite unique, the leak detection accuracy can up to 9.0E-11Pa.m3/sec, suitable for the products which has strict requirements for precisio.

Technicial Paramaeters:

Helium Leak Detection Discription:

A. The operator places the soaked workpiece in a vacuum chamber, manually closes the vacuum chamber door and presses the start button;

B. The chamber is vacuumed automatically, workpiece gross leakage is detected the by measuring the total amount of air during the process of vacuum chamber evacuation: if there is gross leakage, alarm will be given out; if there is no gross leakage, following process will be continued;

C. Vacuum chamber is vacuumed to the set degree;

D. Helium signal in the vacuum chamber will be detected automatically;

E. Fine leakage of the workpiece will be automatically determined:

If the leak detector finds that there is a helium signal exceeding the set value in the vacuum chamber, it indicates that the workpiece has a fine leak, and the fine leakage indicator light on the operation interface is on. The operator presses the confirmation button on the operation panel, the chamber door is opened automatically, the workpiece is unloaded, workpiece is placed in unqualified area;

If the leak detector does not find a helium signal exceeding the set value in the vacuum chamber, it indicates that the workpiece has passed the fine leakage test, the qualified indicator on the operation interface is on, the chamber door is manually opened, the workpiece is unloaded, and the workpiece is placed in the qualified area.

This equipment adopts INFICON oil-free vacuum pump to exclude the contamination of leaked parts with oil vapor.

Technical Characteristics:

Our system adopts process automation technology, combines the process equipment with the electrical automatic control technology. The entire workpiece detection process is automatically controlled by the PLC and the touch screen, operator only needs to load and unload the workpiece, no human judgment is required for each process. The PLC program automatically judges the result of the previous step and completes the execution of the next step according to the preset conditions, that replaces the human judgment and execution, makes operator liberated from complicated brain power work.

The system is equipped with a standard helium leak gauge of 1.0x10^-11Pa.m3/sec. The relevant certificates will be issued by China National Institute of Metrology. The accuracy and stability of the equipment can be traced back to China National Institute of Metrology. Ensure the leak gauge in the system approved by third-party.